基于MAX1452的MEMS压力传感器校准系统的设计

为解决飞行器气动参数测试系统中压力测量时的温度漂移问题,设计了一种基于MAX1452的MEMS压力传感器校准系统.介绍了系统结构、功能、数据传输及软件实现.利用Visual C + +6.0对上位机软件进行编程,实现了对核心补偿器件MAX1452的可视化操作与控制.通过最小二乘法进行曲线拟合,得到零点及灵敏度温度漂移补偿数据.运行结果表明:系统工作可靠,压力参数测量精度优于0.5%FS.

Calibration System of MEMS Pressure Sensor with MAX1452

In order to solve the problem of temperature drift in the pressure testing of the aircraft aerodynamic parameters, a calibration system of MEMS pressure sensor based on MAX1452 was presented. The structure, function, data transmission and software design of the system were introduced. It designed the program of the host computer under Visual C++ 6.0 to implement visual operation and control about MAX1452 which was the main compensation unit. A curve fitting algorithm based on least square method was adopted to obtain the compensation data. Application results show that it is a reliable system with good effect, the precision of pressure testing is better than 0.5% FS.