| 厚膜半导体工艺在气敏元件生产中的应用 |
| |
| 引用本文： | 张小水,祁明锋,钟克创,王利利,范子亮,谷永谦.厚膜半导体工艺在气敏元件生产中的应用[J].仪表技术与传感器,2009(Z1). |
| |
| 作者姓名： | 张小水 祁明锋 钟克创 王利利 范子亮 谷永谦 |
| |
| 作者单位： | 郑州炜盛电子科技有限公司,河南郑州,450001 |
| |
| 摘 要： | 文中讲述了将厚膜半导体工艺应用于气敏元件的生产制作,综合运用精密丝网印刷、激光分割、激光调阻、平面绑定等先进技术,达到了高质量、高效率生产气敏元件的效果.应用半导体工艺制作的气敏元件相比传统工艺制作的产品具有体积小、功耗低、机械性能好、批次一致性好等优点.
|
| 关 键 词： | 厚膜半导体工艺 气敏元件生产 精密丝网印刷 激光分割 激光调阻 平面绑定 |
Application of Thick Film Semi-conductor Technics During Gas Sensor Production |
| |
| ZHANG Xiao-shui,QI Ming-feng,ZHONG Ke-chuang,WANG Li-li,FAN Zi-liang,Gu Yong-qian.Application of Thick Film Semi-conductor Technics During Gas Sensor Production[J].Instrument Technique and Sensor,2009(Z1). |
| |
| Authors: | ZHANG Xiao-shui QI Ming-feng ZHONG Ke-chuang WANG Li-li FAN Zi-liang Gu Yong-qian |
| |
| Abstract: | This article is about production of thick film semi-conductor technics used in gas sensors.Advanced technologies such as precision screen printing,laser division,laser load adjustment,flat tie-up etc are used,thus achieve high quality and efficiency.The gas sensor has advantage of low size and power consumption,good performance and coherence for batch than traditional types. |
| |
| Keywords: | thick-film semi-conductor technics gas sensor production precision screen printing laser division laser load adjustment flat tie-up |
| 本文献已被 万方数据 等数据库收录！ |
|
