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微细电火花成形加工设备关键技术研究
引用本文:付伟,王先逵,曹凤国,李勇,杨大勇.微细电火花成形加工设备关键技术研究[J].现代制造工程,2010(4).
作者姓名:付伟  王先逵  曹凤国  李勇  杨大勇
作者单位:1. 清华大学精密仪器与机械学系,北京,100084;北京市电加工研究所,北京,100083
2. 清华大学精密仪器与机械学系,北京,100084
3. 北京市电加工研究所,北京,100083
摘    要:基于微细电火花加工的要求,对微细电火花成形加工设备中的关键技术进行研究,成功研制了一套高精度的微细放电加工设备产品,包括一台微细电火花加工机床和一台精密脉冲电源。优化机床关键零/部件的结构后,机床的变形小,运动精度高;电源放电稳定,控制精确。经加工试验表明,该设备加工效果较好,加工精度和稳定性较高,加工出的窄槽工件的尺寸精度可达到5μm,加工直径为300μm的小孔,其圆度误差达到3μm,可满足微细电火花加工的要求。

关 键 词:微细电火花加工  设备  机床  脉冲电源  精密

Research on key technologies of micro EDM equipment
FU Wei,WANG Xian-kui,CAO Feng-guo,LI Yong,YANG Da-yong.Research on key technologies of micro EDM equipment[J].Modern Manufacturing Engineering,2010(4).
Authors:FU Wei    WANG Xian-kui  CAO Feng-guo  LI Yong  YANG Da-yong
Affiliation:FU Wei1,2,WANG Xian-kui1,CAO Feng-guo2,LI Yong1,YANG Da-yong2 (1 Department of Precision Instruments , Mechanology,Tsinghua University,Beijing 100084,China,2 Beijing Institute of Electro-machining,Beijing 100083,China)
Abstract:The key technologies of the micro EDM(Electrical Discharge Machining)equipment are researched based on the requirements of micro EDM.A set of micro EDM equipment is developed successfully,including a precision micro EDM machine tool and a pulse power supply.The structures of some key parts of the tool are designed optimally,so that it has a very small deformation and a high motion precision.The power supply works stably,with a good performance of discharge and control.Through machining experiments,good mach...
Keywords:micro EDM  equipment  machine tool  pulse power supply  precision  
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