| 激光直写系统焦斑整形的研究 |
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| 引用本文： | 李凤友,李红军,卢振武,廖江红.激光直写系统焦斑整形的研究[J].光学精密工程,2001,9(1):14-18. |
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| 作者姓名： | 李凤友 李红军 卢振武 廖江红 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所, |
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| 基金项目： | 应用光学国家重点实验室基金资助项目! (DA 0 0 Q0 5 D) |
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| 摘 要： | 针对激光直写光刻系统设计整形衍射光学元件(DOE),对写入焦斑的整形进行了研究。提出对不同焦距写入物镜下的焦斑,利用同一个DOE加以整形的方法。模拟表明:整形后焦斑的面形和边缘显著改善,衍射效率高于实用指标,提供一种改善系统分辨能力的有效途径。
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| 关 键 词： | 激光直写 光束整形 DOE |
| 文章编号： | 1004-924X(2001)01-00014-05 |
| 收稿时间： | 2000-10-03 |
| 修稿时间： | 2000-12-01 |
Focused spot shaping in laser writing system |
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| LI Feng-you,LI Hong-jun,LU Zhen-wu,LIAO Jiang-hong.Focused spot shaping in laser writing system[J].Optics and Precision Engineering,2001,9(1):14-18. |
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| Authors: | LI Feng-you LI Hong-jun LU Zhen-wu LIAO Jiang-hong |
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| Affiliation: | State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130022, China |
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| Abstract: | The diffractive optical elements (DOE) with shaping the focused spot for laser writing system are designed , while discussing their performances for shaping laser writing spot. An efficient way of using a DOE to shape the laser writing spot under the objectives with various focal lengths is presented. The simulating results indicate that the spot-shaped sizes is only more twice than the diffraction limited spot sizes under this system, its diffraction efficiency is about 71.38% and the edges of the uniform area become dramatically sharper than the result without DOE. |
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| Keywords: | laser writing beam shaping DOE |
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