一种采用微硅片狭缝的新型微小型光纤光谱仪

研制了一种采用微硅片狭缝代替传统机械狭缝的微小型光纤光谱仪。采用MEMS(微机电系统)工艺制造出了体积小、厚度薄的一体式微硅片狭缝,并分析了微硅片狭缝的狭缝不平直度对微小型光纤光谱仪分辨率的影响,通过测试系统分辨率的实验,验证了采用微硅片狭缝的可行性。同时,对微小型光纤光谱仪的光谱带宽和像元分辨力进行了讨论,为波长的标定提供了一种理论依据。通过对采集的汞灯谱线的分析和MATLAB的精确计算,验证了所提出的通用波长-像元迭代公式的正确性,从而研制出了一种采用微硅片狭缝的半峰全宽为0.85 nm,波长标定精度小于0.2 nm,体积为50 mm×46 mm×14 mm的微小型光纤光谱仪。

A new mini-fiber-spectrometer adopting micro-silicon-slit

A new mini-fiber-spectrometer was developed with micro-silicon-slit instead of traditional mechanical slit. By calculating the impact of nonlinearity MEMS-based slit on the resolution of the mini-fiber-spectrometer and measuring the resolution of the system, it finds that using micro-silicon slit is efficient. Meantime, a theory for wavelength-pixel calibrating was brought forward after analyzing the resolution of pixel and FWHM, which was validated by analyzing data of the experiments of measuring the mercury-arc and fine calculating through the tool of MATLAB system. The results show that the new mini-fiber-spectrometer with micro-silicon-slit is worked out, its FWHM is 0.85 nm, the precision of the wavelength calibration is less than 0.2 nm and the volume is 50 mm×46 mm×14 mm.