高陡度保形光学镜面的坐标测量

针对高陡度保形光学镜面的检测,提出了基于多段拼接的光学镜面坐标测量方法。该方法将保形光学镜面轮廓的测量分割为具有一定重叠区域的数段较短的面形轮廓的测量,通过测量系统与被测工件之间的相对旋转与平移运动调整被测工件的姿态实现分段轮廓的测量。然后使用拼接算法将各段面形轮廓拼接起来,重构出被测工件的面形误差。建立了该坐标测量法的数学模型,提出了基于最小二乘的迭代拼接算法,并在Matlab下对测量算法进行了仿真。开发了高精度的测量试验系统并分别在VC与Matlab下编写了测控软件与数据分析软件。对一口径为120mm,长径比为1.2的椭球形保形头罩进行了实测试验。仿真与测量试验表明,上述方法能够高精度地重构出面形轮廓,方法简单,实用。

Coordinate measurement of steep conformal optics

The measurement of conformal optics is always difficult to perform in the field of ultra-precise manufacturing and measuring. In this paper, a coordinate measuring method based on stitching profile was proposed for the conformal optics. By proposed method, the profile of the conformal optics was divided into several sections with some overlap points, then the every local profile was measured by adjusting the attitude of the measured workpiece, which was completed by the relative movement between the measuring system and the measured workpiece in rotation and transition. Furthermore, an algorithm based on the least square was used to stitch the local profile and to reconstruct the global profile. After those, a mathematical model of the method was established and an iteration algorithm was put forward. An experimental setup was built and the corresponding measurement and data processing software were written with VC and MATLAB, respectively. Finally, an ellipse with a diameter of 120 mm and a length/diameter of 1.2 was tested. Simulations and experiments indicate that the method is practical and simple, and can reconstruct the global profile accurately.