飞秒激光多次聚焦在并行加工中的应用研究

飞秒激光的并行加工多是利用分光元件先分光再加工，在实际应用中，这种方法无法对加工出的平行结果进行灵活的控制。本文通过控制飞秒激光在介质中的多次聚焦，实现微光波导的并行加工，总结出影响加工的控制因素，并且对这种加工方法的机理和控制因素作了理论分析。由于不依赖分光元件，该方法对并行加工的控制相对灵活。对于飞秒激光的并行加工，该方法提出了一个值得发展的方向。

Research on application of femtosecond laser multi-focus on parallel fabrication

The femtosecond laser often makes parallel fabrication via multi-beam, which is split by the beam splitters. This ordinary method can not control the fabricated parallel outcomes flexibly in practical application. In this article, the parallel fabrication of micro waveguides is realized by controlling the multi-focus of femtosecond laser in optical media. The controlling factors which affect the fabrication are summarized. And the mechanism and factors are theoretically analyzed. This method is relatively flexible on the controlling of the parallel fabricating, because it doesn’t depend on any beam splitters. This fabrication method brings forward a revolutionary way of the parallel fabrication of femtosecond laser.