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用于测量大型离轴反射式光学系统的波像差的便携式干涉仪的研制
引用本文:马军,居波,何煦,韩冰.用于测量大型离轴反射式光学系统的波像差的便携式干涉仪的研制[J].光学精密工程,2008,16(12):2524-2530.
作者姓名:马军  居波  何煦  韩冰
作者单位:中国科学院长春光学精密机械与物理研究所
摘    要:为便于检测离轴三反形式的光学系统,自行研制的便携式的干涉仪用于检测光学系统的波像差。该设备利用平面镜作为标准镜,通过平面波与球面波的转换与被测光学系统进行干涉,屏弃了一个标准球面镜对应一个被测光学系统,减少了标准镜的数量的同时,降低了成本。检测速度快捷,结果准确。该设备总重量不超过5公斤,体积小、便携、价格低廉,具有很大的发展前景。

关 键 词:干涉、波像差、离轴、测量
收稿时间:2008-10-14
修稿时间:2008-11-25

The Research of Easy-carry Interferometer for Uncoaxial Three-mirror Reflective System Wave Aberration Testing
HAN Bing.The Research of Easy-carry Interferometer for Uncoaxial Three-mirror Reflective System Wave Aberration Testing[J].Optics and Precision Engineering,2008,16(12):2524-2530.
Authors:HAN Bing
Abstract:In order to facilitate the detection and assembly of off-axis three-mirror reflective optical system, developed a portable interferometer. The equipment utilizes the flat mirror as the mirror one, through the optical system use plane wave transforming for spherical wave to interfere. The equipment rejects the traditional way that a standard spherical lens corresponded to an optical system under test, decreasing the number of standard mirror and reducing the cost. The test is faster and the result is accurate and reliable. It is not more than 5 kilograms, smaller size, portable, inexpensive, great prospects for development.
Keywords:interference  wave aberration  off-axis  testing
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