基于PZT的非球面能动抛光盘定位误差分析

摘要：变形抛光盘能够改变面型以用于非球面镜加工。基于PZT压电陶瓷驱动器的非球面能动抛光磨盘，能够在PZT驱动器的作用下改变面型，为中小口径非球面镜加工提供了一种新的工具。非球面能动抛光磨盘在相对非球面工件移动时，根据位置，计算出每个PZT驱动器的变形量。因此定位误差会引起压电陶瓷驱动器的变形误差，从而造成输出的非球面面型误差。本文对定位误差进行了理论分析和计算，根据计算结果，定位误差应该限制在±0.5mm。

Location Error Analysis of Deformable Aspheric Polishing Lap Based on PZT Actuator

Abstract: In aspheric mirror polishing progress, the deformable polishing lap can change the lap surface to fit the surface of aspheric optical mirror. A novel method of designing deformable polishing lap is brought forward by using PZT actuator. It consists of an aluminum disk which can change surface profile continuously under the control of PZT actuators. When the deformable aspherical polishing lap moves on the surface of aspherical mirror, the needed deformation of each PZT actuator is calculated at any location. After each PZT actuator deforming, the surface profile of deformable aspherical polishing lap is changed to an off-axis surface of aspheric optical mirror at that location. Location error will lead the deformation error of each PZT actuator and surface profile error of lap. In this article, location error is analyzed and calculated. The result shows that the location error should be controlled in less than ±0.5mm.