| 相移器平移误差与倾斜误差不敏感相移新算法 |
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| 引用本文： | 刘伟.相移器平移误差与倾斜误差不敏感相移新算法[J].光学精密工程,2000,8(2):185-188. |
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| 作者姓名： | 刘伟 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所,吉林,长春,130021 |
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| 摘 要： | 相移器的相移误差包括平移误差与倾斜误差,使同一幅干涉图诸像素点的相移量并不相等,但仍然在同一平面上.据此,本文提出了消除相移器位移误差与倾斜误差的最小二乘迭代算法.通过对相移平面的最小二乘拟合,即可以消除相移器平移误差与倾斜误差对位相分布求解结果的影响.并通过数值模拟,验证了这种算法在消除相移器位移误差与倾斜影响上的有效性.
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| 关 键 词： | 相移干涉术 相移误差 最小二乘解 迭代法 |
| 收稿时间： | 1999-07-12 |
| 修稿时间： | 1999-10-21 |
New algorithm insensitive to the piston and tilt errors of reference mirror for phase stepping interferometer |
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| GUO Hong wei,CHEN Ming yi.New algorithm insensitive to the piston and tilt errors of reference mirror for phase stepping interferometer[J].Optics and Precision Engineering,2000,8(2):185-188. |
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| Authors: | GUO Hong wei CHEN Ming yi |
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| Affiliation: | Precision Mechanical Engineering Department, Shanghai University, Jiading, Shanghai 201800, China |
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| Abstract: | A new algorithm insensitive to the piston and tilt errors of reference mirror for phase stepping interferometer is presented. Clearly, if the reference mirror has tilt and piston errors caused by phase-shifting, every pixel on the same interferogram will have different phase- shift values. And by the fact that the phase shifts of all the pixel on the same interferogram are still kept on a same plane, so by least-squares fitting to the phase-shift plane, the errors can be eliminated. The validity of this algorithm has been demonstrated by means of computer simulation. |
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| Keywords: | phase shifting interferometry phase shifting errors least squares fitting iterative |
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