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改进的飞秒激光加工微型光波导方法
引用本文:龚小竞,褚家如,杨建军,张铁群,朱晓农.改进的飞秒激光加工微型光波导方法[J].光学精密工程,2007,15(1):27-32.
作者姓名:龚小竞  褚家如  杨建军  张铁群  朱晓农
作者单位:1. 中国科学技术大学,精密机械与精密仪器系,安徽,合肥,230027
2. 南开大学现代光学所,光电信息技术科学教育部重点实验室,天津,300071
基金项目:国家自然科学基金 , 高等学校博士学科点专项科研项目 , 光学信息技术科学教育部重点实验室开放课题
摘    要:分析了垂直式加工中加工区域光强分布不对称的原因,从理论上总结出改进这种不对称的方法。在分析了仅引入单个透镜就能实现这一改进的可行性后,实验验证了这种改进方法。未改进之前加工出的光波导其端口两个方向直径之比为10:1,甚至更高;而改进后的比例则非常接近1:1。通过对光强不对称的改进,该方法有光路简单,无能量损失的优势。

关 键 词:飞秒激光  垂直式加工  光波导
文章编号:1004-924X(2007)01-0027-06
收稿时间:2006-04-22
修稿时间:2006-04-22

An improved way for fabricating micro-waveguide by femtosecond laser
GONG Xiao-jing,CHU Jia-ru,YANG Jian-jun,ZHANG Tie-qun,ZHU Xiao-nong.An improved way for fabricating micro-waveguide by femtosecond laser[J].Optics and Precision Engineering,2007,15(1):27-32.
Authors:GONG Xiao-jing  CHU Jia-ru  YANG Jian-jun  ZHANG Tie-qun  ZHU Xiao-nong
Affiliation:1. Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, He f ei 230027, China 2. Key Laboratory of Opto-electronic Information Science and Technology, Ministry of Education, Institute of Modern Optics, Nankai University, Tianjin 300071, China
Abstract:An improved way for fabricating micro-waveguide was presented by analysing the asymmetry of laser intensity distribution in perpendicular fabrication. By incorporating a lens into the system, the improvement of laser intensity distribution was confirmed in experiments. Experimental results show that the ratio of the diameters of the two direction of waveguide's port is more than 10:1 before improvement; the ratio is very close to 1:1 after using the improved method. Comparing with other improvement, this method is superior in simple optical path and no additional energy loss.
Keywords:femtosecond laser  perpendicular fabrication  waveguide
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