基于时间参考点的差动式线阵CCD位移传感器

为了将线阵CCD应用于实际工程的大尺寸位移测量，利用线阵CCD像元空间与输出时间的对应关系，提出了一种差动式测量的线阵CCD位移传感器测量系统。分析了线阵CCD位移测量存在的问题，结合线阵CCD中像元空间与驱动脉冲之间的对应关系，提出一种以时间为参考点的差动式测量方法。该方法用两个空间上对齐、时间上错开半个积分周期的线阵CCD检测透光挡板上等间距分布的透光光线的位置变化；通过计算两个CCD上输出光信号的时间差，用匀速扫描测量原理实现对空间位移的测量。用雷尼绍激光干涉仪对所研制的线阵CCD位移传感器进行了校准，结果显示：在有效测量范围（600.05 mm）内，经过修正后的测量误差可控制在±2 μm以内，验证了用差动法实现线阵CCD大尺寸精密位移测量的可行性。

Differential and linear CCD displacement sensors based on time reference points

To realize the large displacement measurement in the practical engineering by using the linear CCD sensors, a measuring system of linear CCD displacement sensors based on the differential measurement method is proposed. According to the problem exciting in the linear CCD displacement measurement and the relationship between pixel space and drive pulse in the linear CCD sensors, a differential measurement method which uses time as a reference point is proposed. This method uses two linear CCD sensors aligned in a space and staggered with half of integration period in time to test position changes of the light transmission which is equally spaced in the light baffle. By calculating the value of time difference of optical signals from the two linear CCD sensors and using the uniform scanning measurement principle, the spatial displacements are obtained. After the calibration of the Renishaw laser interferometer, the measuring errors of the developed linear CCD displacement sensors are controlled within ±2 μm for an effective measuring range of 600.05 mm. It concludes that the feasibility of large precision displacement measurement using the linear CCD sensors is verified with the differential method.