| 高精度光学表面磁流变修形技术研究 |
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| 引用本文： | 石峰,戴一帆,彭小强,宋辞.高精度光学表面磁流变修形技术研究[J].光学精密工程,2009,17(8):1859-1864. |
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| 作者姓名： | 石峰 戴一帆 彭小强 宋辞 |
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| 作者单位： | 国防科学技术大学,机电工程与自动化学院,湖南,长沙,410073 |
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| 基金项目： | 国家自然科学基金重点资助项目，国家自然科学基金资助项目，部委级基金资助项目 |
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| 摘 要： | 作为一种确定性子孔径的光学加工方法，磁流变抛光具有高精度、高效率、高表面质量以及无亚表面损伤的特点，有能力对各种形状的光学零件进行加工。本文系统的介绍了磁流变抛光高精度光学表面的关键技术，并采用自研的KDMRF－1000磁流变抛光机床和KDMRW-1水基磁流变抛光液对直径100mm的K4材料平面反射镜和直径200mm的K9材料球面反射镜进行加工实验。样件一面形收敛到PV值55.3nm，面形RMS值5.5nm；样件二面形收敛到PV值40.5nm，面形RMS值5nm。样件的表面粗糙度均有显著改善。
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| 关 键 词： | 磁流变抛光 高精度光学表面 |
| 收稿时间： | 2008-12-01 |
| 修稿时间： | 2009-02-13 |
Magnetorheological finishing for high-precision optical surface |
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| SHI Feng,DAI Yi-fan,PENG Xiao-qiang,SONG Ci.Magnetorheological finishing for high-precision optical surface[J].Optics and Precision Engineering,2009,17(8):1859-1864. |
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| Authors: | SHI Feng DAI Yi-fan PENG Xiao-qiang SONG Ci |
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| Affiliation: | SHI Feng,DAI Yi-fan,PENG Xiao-qiang,SONG Ci (College of Mechatronics Engineering and Automation,National University of Defense Technology,Changsha 410073,China) |
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| Abstract: | Abstract: As a deterministic sub-aperture magnetically assisted polishing method, Magnetorheological Finishing (MRF) has the ability to produce optical surfaces with high accuracy on a wide variety of shapes. This paper mainly introduces fundamental principle of MRF and summarizes some key problems in MRF process. Using KDMRF-1000 MRF polishing machine and KDMRW-1 water based MR fluids, one K4 flat work piece (100 mm in diameter) and one K9 sphere work piece (200 mm in diameter) are polished. Finally, work piece one is 55.3nm peak-to-valley (PV) value, 5.5nm root-mean-square (RMS) value and work piece two is 40.5nm PV value and 5nm RMS. Also, surface roughnesses of two work pieces are improved obviously.
Keywords: Magnetorheological Finishing (MRF), MR Fluids, High-Precision Optical Surface |
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| Keywords: | Magnetorheological Finishing (MRF) High-Precision Optical Surfaces |
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