基于高速摄像的双线性振动陀螺力学特性分析

针对微机械陀螺特征尺寸小、振动频率高,其动态特性难以精确评价的问题,提出了基于高速摄像技术、显微技术与数字图像相关技术的测试方案。并用此方法测量了双线性振动陀螺的固有频率、品质因子、—阶模态振型和杨氏模量。实验数据表明,系统分辨率可达0.01 μm,不同驱动频率下所测振子响应频率误差小于0.023%。

Analysis of mechanical characteristics in the double linear vibratory gyroscope using high speed photography

To evaluate the dynamic characteristics of Micro-Gyroscope with small dimension and high vibration frequency, a new measurement setup based on the high speed camera armed with microscope and digital image technique was presented.The natural frequency,quality factor,first mode of fold beam and Young’s modulus of the double linear vibratory gyroscope were measured by the new setup. The experimental results show the sensitivity of this setup is up to 0.01 μm and relative errors in different driving frequencies are less than 0.023%.