| 子孔径变换与多孔径扫描拼接技术 |
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| 引用本文： | 程维明,陈明仪.子孔径变换与多孔径扫描拼接技术[J].光学精密工程,1993,1(1):54-58. |
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| 作者姓名： | 程维明 陈明仪 |
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| 作者单位： | 上海科技大学应用光学与检测实验室 上海201800
(程维明)，上海科技大学应用光学与检测实验室 上海201800(陈明仪) |
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| 摘 要： | 多孔径扫描拼接技术是检测高精度大孔径平面面形的有效手段。利用子孔径变换实现多孔径扫描拼接,具有精度高,可靠性好,数据处理简单的特点。本文给出了数学模型,并分析了实测结果。
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| 关 键 词： | 多孔径 扫描拼接 大孔径面形检测 |
| 收稿时间： | 1993-01-04 |
Transformation of Subapertures in Multi-Aperture Overlap-Scanning Technique |
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| Cheng Weiming,Chen Mingyi Lab.of Applied Oplies and Metrology,Shanghai University of Science and Technology,Shanghai.Transformation of Subapertures in Multi-Aperture Overlap-Scanning Technique[J].Optics and Precision Engineering,1993,1(1):54-58. |
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| Authors: | Cheng Weiming Chen Mingyi Labof Applied Oplies and Metrology Shanghai University of Science and Technology Shanghai |
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| Affiliation: | Lab.of Applied Oplies, Metrology, Shanghai University of Science, Technology, Shanghai, 201800 |
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| Abstract: | Multi-aperture overlap-scanning technique (MAOST) a means to measure high precision, lager aperture flat. With transformation of subapertures, MAOST is precise, reliable and easy to process data. In this paper, the mathematical model and test results are discussed in detail. |
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| Keywords: | Multi-aperture Overlap-scanning Large optics test |
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