毫米级微型机器人操作手的研制和操作特性

采用单晶片型压电悬臂梁制作了一种双悬臂梁结构的微型夹持器,用作毫米级微型机器人的微操作手.该微夹持器整体尺寸为15mm×2mm×2mm,重量为100mg.在分析该悬臂梁操作原理的基础上,选用PbNi_1/3Nb_2/3-PbZrO₃-PbTiO₃三元系压电陶瓷准同型相界的配方作为悬臂梁压电驱动材料,这种压电陶瓷具有高压电常数 (d₃₁) 和机电耦合系数 (K_p).进一步研究了压电微夹持器的操作特性.结果表明:50V电场下,其最大张口距离可以达到40μm,最大夹持力为25.7×10^-3N.

Design and Operational Properties of a Manipulator for Minimeter-size Microrobot

The piezoelectric unimorphs are used to fabricate a microgripper for the millimeter size microrobot. The size of the piezoelectric microgripper is about 15mm×2mm×2mm and the weight is about 100 mg. Based on analysis of operational principle of the piezoelectric microgripper, composition of morphotropic phase boundary of the PbNi_1/3 Nb_2/3 PbZrO₃ PbTiO₃ ternary ceramics is selected to fabricate the piezoelectric microgripper. The ternary piezoelectric ceramics have high piezoelectric modulus (d₃₁) and electromechanical coupling factor (K_p). Operational properties of the piezoelectric microgripper are investigated. Results show that the microgripper can achieve tip deflection of 40μm and gripping force of 25.7×10^-3N when voltage of 50V is applied.