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Quantitative mapping of high modulus materials at the nanoscale: comparative study between atomic force microscopy and nanoindentation
Authors:R COQ GERMANICUS  D MERCIER  F AGREBI  M FÈBVRE  D MARIOLLE  Ph DESCAMPS  Ph LECLÈRE
Affiliation:1. Normandie Univ, UNICAEN, ENSICAEN, IUT, CNRS, CRISMAT, Caen, 14000 France;2. CRM Group, Liège, Belgium;3. Bruker, Nano Surfaces, Palaiseau, France;4. CEA, LETI, UNIV, Grenoble Alpes, Grenoble, France;5. UNIROUEN, ESIGELEC, IRSEEM, Normandie UNIV, Rouen, France;6. CIRMAP, Service de Chimie des Matériaux Nouveaux, Université de Mons (UMONS), Mons, Belgium
Abstract:
Keywords:Atomic Force Microscopy (AFM)  hardness  nanoindentation  peak force quantitative nanomechanical mapping (PF-QNM)  silica beads  Young's modulus
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