介观尺度微型铣床开发及性能试验

针对微机电系统(Microeletro mechanical system, MEMS)技术和超精密加工技术局限，开展面向介观尺度微细铣削技术的研究。首先根据介观尺度铣削的加工特点，对其机理研究的关键问题进行详细的分析和讨论，提出微细铣削理论的研究重点及研究方法。然后在分析微细铣削成形条件和加工要求的基础上，开发微型铣床系统，并对系统各组成子系统及性能指标进行描述。最后开展机床加工性能评估试验，通过精度测量、误差分析和误差补偿提高工作台的定位精度达到1.62 μm，采用直径0.127 mm铣刀开展微铣削试验，通过表面粗糙度测量和同心圆切削试验评估机床的加工精度，在此基础上通过复杂零件加工实例进一步说明机床的加工能力，论证小型化机床加工技术的可行性和实用性。

DEVELOPMENT OF MESO-SCALE MILLING MACHINE TOOL AND ITS PERFORMANCE ANALYSIS

In order to overcome the shortcomings of current technologies for meso scale manufacturing,such as MEMS and ultra precision machining,meso milling process with miniatur- ized machine tool is developed.First,the related technologies for the process mechanic research are investigated based on the characteristics of meso milling process.An overview of the key issues is presented and research approaches are proposed as well.Then,the meso machine tool system is developed for the mechanisms research.The subsystems and their specifications are described.Finally,some tests are done to evaluate the sys- tem performance.The tests consist of the positioning subsystem precision measurement,the assessment test for machining pro- cess and the experiments for some machining cases.Through these test analysis,meso milling process is proved to be feasible and applicable.