基于PSD的旋转机械振动传感器

研究了基于二维光位置敏感探测器(position sensitive detector,简称PSD)的激光振动传感器,重点介绍了PSD的结构、位置和振动检测原理,给出了位置坐标函数表达式和相应的输出信号检测电路框图,分析了影响该传感器检测精度的因素,提出了相应的解决办法,提供了传感器检定数据和实测振动波形。试验结果表明,该传感器各项性能指标完全满足旋转机械轴振测量要求,为旋转机械振动提供了一种新的可靠测量方法。

Rotating Machinery Vibration Sensor Based on Position Sensitive Detector

Abstract The vibration measurement or monitoring of rotating machinery has been the most important method in fault diagnosis and analysis. The sensor plays an important role in measurement or monitoring systems. In this paper, the vibration sensor based on laser and Position Sensitive Detector (PSD) has been researched, it can supply a new measurement means with vibration of rotating machinery. The structure, measuring principle of position and vibration of the PSD are introduced. The current function expression of position coordinate and the corresponding detecting circuit drawings are given. Meanwhile, not only the factors affecting measurement accuracy of the sensor are analyzed, but also the method solving is proposed. Finally, the verification data and vibration waveform are provided. According to the test results, it indicates that all performances of this sensor can meet demands of measurement on rotor vibration of rotating machinery.