超精密环境温度控制及温度测量技术研究

分析在超精密加工环境中进行高精度温度测量与控制的原理及方法。在分层次逐步实现的原则下，依据传热学原理，规则并初步建成了一个超精密的加工环境。

Research on Ultra-Precision Environment Temperature Control and Measurement

This paper describes the principle and technology of high accuracy temperature measurement and control applied in ultra-precision machining environment. It also describes the mathematical model of the thermostatic environment and two-mode control algorithm combined by adaptive and predictive fuzzy control. Under the guidance of heat transfer theory, a prototype of thermostatic ultra-precision machining environment is built. Based on comparation of several kinds of temperature sensors, a quartz type temperature sensor with resolution of 1 mill degree centigrade is selected and realized in this prototype. The experimental data reveals that the total error of thermoregulation is less than 0 1 degree centigrade. This low cost prototype is quite suitable for ultra-precision environment unable to use oil spraying system, such as ultra-precision machine tools employing air spindle and air lubricated hydrostatic slide guide.