| 超精密加工技术的发展及对策 |
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| 引用本文： | 李圣怡,戴一帆.超精密加工技术的发展及对策[J].中国机械工程,2000,11(8):841-844. |
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| 作者姓名： | 李圣怡 戴一帆 |
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| 作者单位： | 1. 国防科学技术大学,长沙市,410073
2. 国防科学技术大学机电工程与自动化学院机电工程研究所 |
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| 摘 要： | 介绍超精密加工及其应用背景，发展动向，以及超精密加工关键技术的一些最新成果，从超精密加工技术推广应用的角度阐述其模块化，廉价化发展趋势，同时就如何发展诸如模块化部件，执行系统，测量控制和环境控制等超精密加工关键技术提出一些新的观点和方法。
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| 关 键 词： | 超精密加工 超精密数控 误差检测 超精密机床 |
Development of Ultra-Precision Machining Technology and Our Strategy |
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| LI Shengyi,DAI Yifan.Development of Ultra-Precision Machining Technology and Our Strategy[J].China Mechanical Engineering,2000,11(8):841-844. |
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| Authors: | LI Shengyi DAI Yifan |
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| Abstract: | This paper describes ultra-precision machining technology, its application background and its recent development. The trend of modularization and cheapenation is described in detail from the point of view of widespread application of this technology. Some new ideas about modular component, actuating system, measurement technology, and environment control are pointed out in order to promote the technology. |
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| Keywords: | ultra-precision machining machine tools ultra-precision numerical control error measurement |
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