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Fabrication of Fuze Micro-electro-mechanical System Safety Device |
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| Authors: | DU Liqun JIA Shengfang NIE Weirong WANG Qijia Key Laboratory for Precision & Non-traditional Machining Technology of Ministry of Education Dalian University of Technology Dalian China School of Mechanical Engineering Nanjing University of Science Technology Nanjing China |
| Affiliation: | DU Liqun1,*,JIA Shengfang1,NIE Weirong2,and WANG Qijia1 1 Key Laboratory for Precision & Non-traditional Machining Technology of Ministry of Education,Dalian University of Technology,Dalian 116024,China 2 School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China |
| Abstract: | Fuze micro-electro-mechanical system(MEMS) has become a popular subject in recent years.Studies have been done for the application of MEMS-based fuze safety and arm devices.The existing researches mainly focused on reducing the cost and volume of the fuze safety device.The reduction in volume allows more payload and,thus,makes small-caliber rounds more effective and the weapon system more affordable.At present,MEMS-based fuze safety devices are fabricated mainly by using deep reactive ion ething or LIGA tec... |
| Keywords: | fuze MEMS safety device UV-LIGA technology double-layer moveable device micro electroforming |
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