| 机载压阻式压力传感器设计与加工 |
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| 引用本文： | 张栋,李永红. 机载压阻式压力传感器设计与加工[J]. 仪表技术, 2007, 0(6): 62-64 |
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| 作者姓名： | 张栋 李永红 |
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| 作者单位： | 中北大学,山西,太原,030051 |
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| 摘 要： | 介绍一种压阻式压力传感器的设计原理和加工技术，设计出了敏感电路和硅膜结构，根据所设计压力传感器的结构特点和国内现有加工设备，采用了体硅加工技术和表面加工技术相结合的方法进行加工研究并给出了加工模型。
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| 关 键 词： | 压力传感器 加工工艺 光刻 腐蚀 扩散 |
| 文章编号： | 1006-2394（2007）06-0062-03 |
| 修稿时间： | 2007-02-01 |
Study on Pressure Sensor Based on MEMS Processing Technology |
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| ZHANG Dong,LI Yong-hong. Study on Pressure Sensor Based on MEMS Processing Technology[J]. Instrumentation Technology, 2007, 0(6): 62-64 |
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| Authors: | ZHANG Dong LI Yong-hong |
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| Affiliation: | School of Information and Communication Engineering, North University of China, Taiyuan 030051, China |
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| Abstract: | This paper introduces the study of low stress micro-sensor manufacturing and design principle. It pres- ents the methods combining both the bulk silicon micro-machining and surface sacrificial layer technology according to the domestic structures of the low stress micro-sensor with detailed manufacturing steps on this study. |
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| Keywords: | MEMS |
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