| Surface Electromechanical Coupling on DLC Film with Conductive Atomic Force Microscope |
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| 作者姓名： | 朱守星 丁建宁 范真 李长生 蔡兰 杨继昌 |
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| 作者单位： | [1]Micro／NanoScienceandTechnologyResearchCenter,JiangSuUniversity,Zhenjiang212013,China [2]SchcoolofMechanicalEngineering,DonghuaUniversity,Shanghai200051,China |
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| 基金项目： | The project supported by the Special Fund and Open Foundation of Micro/Nano Technology Center of Jiangsu University (No. 1291400001) |
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| 摘 要： | Diamond-like carbon (DLC) film composed of microscopically insulation but microscopically a mixture of conducting (sp^2) and insulating (sp^3) phases was discussed on the local modification with a conductive atomic force microscope (C-AFM). Especially, a topographic change was observed when a direct current (DC) bias-voltage was applied to the DLC film. Experimental results show that a nanoscale pit on DLC surface was formed when applying a positive 25 V on DLC film. According to the interacting force between CoCr-coated microelectronic scanning probe (MESP) tip and DLC surface, as well as the Sondheimer oscillation theory, the “scalewing effect“ of the pit was explained. Electromechanical coupling on DLC film suggested that the depth of pits increased with an increase of load applied to surface when the cantilever-deflected signal was less than a certain threshold voltage.
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| 关 键 词： | 原子力显微镜 表面修正 机电耦合 类金刚石碳薄膜 |
Surface Electromechanical Coupling on DLC Film with Conductive Atomic Force Microscope |
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| Zhu Shouxing,Ding Jianning,Fan Zhen
Li Changshen,Cai Lan Yang Jichang
Schcool of Mechanical Engineering,Donghua University,Shanghai ,China
Micro/Nano Science and Technology Research Center,JiangSu University,Zhen-jiang ,China.Surface Electromechanical Coupling on DLC Film with Conductive Atomic Force Microscope[J].Plasma Science & Technology,2004,6(3):2342-2345. |
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| Authors: | Zhu Shouxing Ding Jianning Fan Zhen
Li Changshen Cai Lan Yang Jichang
Schcool of Mechanical Engineering Donghua University Shanghai China
Micro/Nano Science and Technology Research Center JiangSu University Zhen-jiang China |
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| Affiliation: | Zhu Shouxing,Ding Jianning,Fan Zhen
Li Changshen,Cai Lan Yang Jichang
Schcool of Mechanical Engineering,Donghua University,Shanghai 200051,China
Micro/Nano Science and Technology Research Center,JiangSu University,Zhen-jiang 212013,China |
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| Abstract: | Diamond-like carbon (DLC) film composed of microscopically insulation but microscopically a mixture of conducting (sp2) and insulating (spa) phases was discussed on the local modification with a conductive atomic force microscope (C-AFM). Especially, a topographic change was observed when a direct current (DC) bias-voltage was applied to the DLC film. Experimental results show that a nanoscale pit on DLC surface was formed when applying a positive 25 V on DLC film. According to the interacting force between CoCr-coated microelectronic scanning probe (MESP) tip and DLC surface, as well as the Sondheimer oscillation theory, the "scalewing effect" of the pit was explained. Electromechanical coupling on DLC film suggested that the depth of pits increased with an increase of load applied to surface when the cantilever-deflected signal was less than a certain threshold voltage. |
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| Keywords: | atomic force microscope diamond-like carbon surface modification electromechanical coupling |
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