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Advanced applications in microphotonics using proton beam writing
Authors:AA Bettiol  SY Chiam  EJ Teo  C Udalagama  SF Chan  SK Hoi  JA van Kan  MBH Breese  F Watt
Affiliation:Centre for Ion Beam Applications, Department of Physics, National University of Singapore, 2 Science Dr. 3, Singapore 117542, Singapore
Abstract:Proton beam writing (PBW) is a powerful tool for prototyping microphotonic structures in a wide variety of materials including polymers, insulators, semiconductors and metals. Prototyping is achieved either through direct fabrication with the proton beam, or by the fabrication of a master that can be used for replication. In recent times we have explored the use of PBW for various advanced optical applications including fabrication of subwavelength metallic structures and metamaterials, direct write of silicon waveguides for mid IR applications and integrated waveguides for lab-on-a-chip devices. This paper will review the recent progress made in these areas with particular emphasis on the main advantages of using the PBW technique for these novel applications.
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