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| 衬底温度对太阳电池铝背反射电极性能的影响 | |
| 引用本文： | 韩安军,张建军,李林娜,张洪,刘彩池,耿新华,赵颖.衬底温度对太阳电池铝背反射电极性能的影响[J].太阳能学报,2011,32(5):698-703. |
| 作者姓名： | 韩安军 张建军 李林娜 张洪 刘彩池 耿新华 赵颖 |
| 作者单位： | 1. 南开大学光电子薄膜器件与技术研究所,南开大学光电子薄膜器件与技术天津市重点实验室,光电信息技术,科学教育部重点实验室,天津,300071;河北工业大学材料学院,天津,300130 2. 南开大学光电子薄膜器件与技术研究所,南开大学光电子薄膜器件与技术天津市重点实验室,光电信息技术,科学教育部重点实验室,天津,300071 3. 河北工业大学材料学院,天津,300130 |
| 基金项目： | 国家重点基础研究发展(973)计划项目，国家高技术研究发展(863)计划项目，天津市应用基础及前沿技术研究计划项目，天津市国家科技计划配套项目 |
| 摘 要： | 采用中频脉冲磁控溅射在不同衬底温度下制备了太阳电池铝背反射电极,利用X射线衍射仪(XRD)研究了薄膜晶体结构,用X射线光电子谱仪(XPS)分析薄膜的成分,用原子力显微镜(AFM)观察薄膜表面形貌和粗糙度,用分光光度计研究薄膜的反射率。研究发现随衬底温度升高,薄膜中氧含量增加,晶体结构变为混合晶面取向,晶化率降低,表面粗糙度增大,反射率下降。将其应用到NIP非晶硅薄膜太阳电池中,在衬底温度为300℃时,得到了5.6%的电池转换效率。 |
| 关 键 词： | 中频脉冲磁控溅射 衬底温度 铝背反射电极 表面形貌 |
THE INFLUENCE OF SUBSTRATE TEMPERATURE ON THE PROPERTIES OF Al BACK REFLECTOR |
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| Han Anjun,Zhang Jianjun,Li Linna,Zhang Hong,Liu Caichi,Geng Xinhua,Zhao Ying.THE INFLUENCE OF SUBSTRATE TEMPERATURE ON THE PROPERTIES OF Al BACK REFLECTOR[J].Acta Energiae Solaris Sinica,2011,32(5):698-703. | |
| Authors: | Han Anjun Zhang Jianjun Li Linna Zhang Hong Liu Caichi Geng Xinhua Zhao Ying |
| Affiliation: | Han Anjun1,2,Zhang Jianjun1,Li Linna1,Zhang Hong1,Liu Caichi2,Geng Xinhua1,Zhao Ying1(1.Institute of Photo-Electronic Thin Film Devices and Technology of Nankai University,Tianjin Key Laboratory of Photo-Electronic Thin Film Devices and Technology,Key Laboratory of Opto-Electronic Information Science and Technology,Tianjin 300071,China,2.School of Material Science & Engineering,Hebei University of Technology,Tianjin 300130,China) |
| Abstract: | The Al back reflector was prepared by mid-frequency pulse magnetron sputtering at different substrate temperatures.The crystal structure of Al film was studied by XRD;the component of film studied by XPS;the film surface morphology and roughness studied by AFM;the reflection of film studied by spectrophotometer.It is found that the oxygen content increases in the film with increasing the substrate temperature,crystal structure becames into a mixed-crystal plane orientation,the surface roughness increased an... |
| Keywords: | mid-frequency magnetron sputtering substrate temperature Al back reflector surface morphology |
| 本文献已被 CNKI 万方数据 等数据库收录！ | |
