| 压阻式硅微加速度传感器的结构设计与仿真 |
| |
| 引用本文： | 隋丽,石庚辰.压阻式硅微加速度传感器的结构设计与仿真[J].探测与控制学报,2003,25(Z1):52-55. |
| |
| 作者姓名： | 隋丽 石庚辰 |
| |
| 作者单位： | 北京理工大学机电工程学院,北京,100081 |
| |
| 摘 要： | 一般的压阻式硅微加速度传感器结构多采用单梁加质量块的形式,这种形式的传感器灵敏度比较高,但它的横向效应较难克服,文中提出一种四梁结构的加速度传感器,通过仿真计算,说明该结构的加速度传感器具有良好的综合特性.
|
| 关 键 词： | 加速度传感器 灵敏度 固有频率 横向效应 |
| 文章编号： | 1008-1194(2003)S0-0052-04 |
| 修稿时间： | 2002年8月10日 |
Structure Design and Simulation of Piezoresistive Silicon Micro-accelerometer |
| |
| SUI Li,SHI Geng-chen.Structure Design and Simulation of Piezoresistive Silicon Micro-accelerometer[J].Journal of Detection & Control,2003,25(Z1):52-55. |
| |
| Authors: | SUI Li SHI Geng-chen |
| |
| Abstract: | Typically, the basic element of a piezoresistive silicon micro accelerometer is a mass spring system consisting of a single cantilever supporting a mass, this kind of accelerometer has the advantage of a high sensitivity, however, it has the disadvantage of a high cross sensitivity. This paper describes a four beam structure piezoresistive accelerometer; it is prove that the accelerometer has high properties through simulation and calculation. |
| |
| Keywords: | accelerometer sensitivity resonant frequency cross sensitivity |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
