d31模式四悬臂梁压电MEMS加速度计

针对高灵敏度无源加速度计的集成制造需求，提出一种d₃₁工作模式下四悬臂梁集成拾振微球的MEMS压电加速度计敏感结构。建立动力学振动和拾振理论模型，并使用COMSOL 5.0软件对传感器件结构进行建模仿真，通过优化确定满足拾振条件的微器件几何尺寸和结构。利用溶胶凝胶方法实现硅基高品质PZT压电薄膜的异质集成制造，使用MEMS工艺制造微器件并完成传感器的集成和组装。测试结果表明：该加速度计的输入加速度与输出电压的关系为V=1.881a-0.033，电压灵敏度在1 152 Hz时达到13.8 mV/g，表现出良好的灵敏度、线性度和抗干扰能力；新方法具有正确性和工艺方法的可行性，为高性能加速度传感器件提供了一种新的技术途径。

Piezoelectric MEMS Accelerometer With d31 Mode Cantilever Structure

To meet the requirements for integrated manufacturing of highly sensitive passive accelerometers, a MEMS piezoelectric accelerometer sensitive structure with four integrating cantilevers picking up microsphere under d₃₁ operating mode is proposed. The theoretical models of dynamic vibration and vibration picking are established, and the structure of the sensor is modeled and simulated by COMSOL 5.0 software. The geometric size and structure of the micro-device satisfying vibration picking conditions are determined by optimization. Heterogeneous integrated fabrication of high-quality PZT piezoelectric thin film based on silicon is realized by sol-gel method. Micro-device is fabricated by MEMS process and the sensor is assembled. The test results show that the relationship between the input acceleration and the output voltage of the accelerometer is V=1.881a-0.033 and the voltage sensitivity reaches 13.8 mV/g at 1 152 Hz, exhibiting good sensitivity, linearity, and anti-interference capability. The correctness of the research method and the feasibility of the manufacturing process are verified, providing a new technological approach for the high-performance acceleration sensor.