硅基微雷管的原位装药及性能研究

微机电安全保险机构芯片化集成技术的发展，对基于微机电制造工艺的硅基微雷管提出了需求，雷管装药尺寸的减小要求含能材料感度高、起爆威力大。为解决微小尺寸敏感药剂装填的技术难题，文中采用原位生成多孔叠氮化铜的方法，对硅基微雷管进行装药研究。依据GJB/Z 377A-1994 感度试验用兰利法测试硅基微雷管的发火感度，使用电流环测试硅基微雷管发火实际利用的能量，同时对输出威力进行定性测试。测试结果表明：发火电路用充电电容为33 μF时，硅基微雷管的平均发火电压为7.89 V，输出威力可以起爆六硝基杂异伍兹烷(CL-20)装药。

Research on In-situ Charge and Performance of Si-based Micro-detonator

The chip integration of MEMS (Micro-electromechanical system) safety and arming devices has a requirement to develop a miniature detonator technology , and the charge of detonator needs high sensitivity and large detonator output because of its small size. The in-situ preparation of energetic materials is used for researching the charge of Si-based micro-detonator, and the firing energy actually utilized by Si-based micro-detonator is explored using the current loop. Firing sensitivity is tested based on GJB/Z377A-1994 sensitivity test methods:Langlie, and the output is also qualitatively tested. The result shows that 50% of firing sensitivity is 7.89 V at 33 μF, and the detonator output can initiate CL-20.