| Ag、Al掺杂对ZnO薄膜结构和光学性能的影响 |
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| 引用本文： | 秦秀娟,王佳宁,卜立敏,孙丽,孟惠民,刘日平.Ag、Al掺杂对ZnO薄膜结构和光学性能的影响[J].兵器材料科学与工程,2008,31(5). |
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| 作者姓名： | 秦秀娟 王佳宁 卜立敏 孙丽 孟惠民 刘日平 |
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| 作者单位： | [1]北京科技大学材料科学与工程学院,北京100083 [2]燕山大学环境与化学工程学院,河北秦皇岛066004 [3]燕山大学亚稳材料制备技术与科学国家重点实验室,河北秦皇岛066004 |
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| 摘 要： | 采用两种溶胶-凝胶工艺在普通玻璃基片上制备Ag:ZnO和Al:ZnO薄膜,通过XRD、UV-Vis吸收谱等分析方法,研究掺杂Ag和Al对半导体ZnO薄膜的组织结构和光学性能的影响。分析表明:掺杂Ag和Al对ZnO薄膜结构的影响因成胶工艺不同而有差异。但掺杂离子对ZnO薄膜光学性能的影响结论是一致的。即Al3+离子掺杂显著减小了晶粒尺寸,薄膜禁带宽度增大,紫外—可见光吸收边出现蓝移。Ag+离子掺杂增大了晶粒尺寸,薄膜禁带宽度减小,紫外—可见光吸收边出现红移。
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| 关 键 词： | 掺杂ZnO薄膜 溶胶-凝胶法 结构特性 光学特性 |
Effect of Ag and Al doping on structure and optical properties of ZnO thin films |
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| Abstract: | Ag and Al doped ZnO thin films were prepared on glass substrates by two kinds of sol-gel methods, which were characterized by X-ray diffraction, ultra-violet spectrometer. It is found that there are differences between two kinds of sol-gel methods on structural properties, but conclusions on optical properties agree with each other. That is Al-doped ZnO thin films having obvious smaller grain size, band-gap broadening and absorption edge blue shift. However, there are opposite conclusions on Ag doped ZnO thin films. |
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| Keywords: | doped ZnO films sol-gel methods structural properties optical properties |
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