| 沉积时间和靶电流比例对磁控溅射TiAlN涂层耐磨性的影响研究 |
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| 引用本文： | 汤勇,马博,刘彬,袁伟,余彬海,陆龙生.沉积时间和靶电流比例对磁控溅射TiAlN涂层耐磨性的影响研究[J].稀有金属材料与工程,2016,45(12):3057-3061. |
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| 作者姓名： | 汤勇 马博 刘彬 袁伟 余彬海 陆龙生 |
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| 作者单位： | 华南理工大学机汽学院,华南理工大学机汽学院,华南理工大学机汽学院,华南理工大学机汽学院,华南理工大学机汽学院,华南理工大学机汽学院 |
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| 基金项目： | 国家自然科学基金项目（面上项目，重点项目，重大项目） |
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| 摘 要： | 采用磁控溅射工艺在WC-8Co硬质合金基体表面制备了一层厚度分别为2.5μm、3μm和3.5μm的TiAlN涂层,并制备了不同Ti、Al比例的TiAlN涂层,利用摩擦磨损机考察了涂层的承载能力和摩擦学性能,通过扫描电子显微镜观察了磨损试件的表面形貌,通过摩擦系数和显微组织的演变来评价不同成分和不同厚度TiAlN涂层的摩擦学性能。结果表明,随着涂层厚度的增加,涂层的摩擦系数降低,涂层更不易被磨穿,表明在一定范围内增加涂层厚度有利于提高涂层的耐磨损性能；涂层的成分发生改变时,由于Ti、Al元素的共同作用,呈现不同的摩擦性能,当TiAl比例为50：50时,涂层的耐磨性最好。
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| 关 键 词： | 耐磨性 涂层 TiAlN |
| 收稿时间： | 2015/10/30 0:00:00 |
| 修稿时间： | 2016/4/19 0:00:00 |
Research on Influences of Sedimentation Time and Target Current Ratio on Wear Resistance of Magnetron Sputtering TiAlN Coating |
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| Yong Tang,Bo MA,bin liu,Wei Yuan,Binhai Yu and Longsheng Lu.Research on Influences of Sedimentation Time and Target Current Ratio on Wear Resistance of Magnetron Sputtering TiAlN Coating[J].Rare Metal Materials and Engineering,2016,45(12):3057-3061. |
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| Authors: | Yong Tang Bo MA bin liu Wei Yuan Binhai Yu and Longsheng Lu |
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| Affiliation: | Key Laboratory of Surface Functional Structure Manufacturing of Guangdong High Education Institutes,School of Mechanical and Automotive Engineering,South China University of Technology,Key Laboratory of Surface Functional Structure Manufacturing of Guangdong High Education Institutes,School of Mechanical and Automotive Engineering,South China University of Technology,School of Mechanical and Automotive Engineering, South China University of Technology,Key Laboratory of Surface Functional Structure Manufacturing of Guangdong High Education Institutes,School of Mechanical and Automotive Engineering,South China University of Technology,Key Laboratory of Surface Functional Structure Manufacturing of Guangdong High Education Institutes,School of Mechanical and Automotive Engineering,South China University of Technology,Key Laboratory of Surface Functional Structure Manufacturing of Guangdong High Education Institutes,School of Mechanical and Automotive Engineering,South China University of Technology |
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| Abstract: | |
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| Keywords: | resistance coating TiAlN |
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