| 镁合金表面磁控溅射DLC/SiC薄膜的纳米压痕与摩擦磨损性能 |
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| 引用本文： | 许晓静,夏登福,卓刘成,郝欣妮,宗亮.镁合金表面磁控溅射DLC/SiC薄膜的纳米压痕与摩擦磨损性能[J].稀有金属材料与工程,2009,38(Z2). |
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| 作者姓名： | 许晓静 夏登福 卓刘成 郝欣妮 宗亮 |
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| 作者单位： | 江苏大学先进成形技术研究所,江苏,镇江,212013 |
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| 基金项目： | 江苏大学优秀学术青年骨干培养对象基金，江苏省摩擦学重点实验室基金资助 |
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| 摘 要： | 采用室温磁控溅射技术在镁合金(AZ91D)表面制备出DLC/SiC(类金刚石/碳化硅)双层薄膜(SiC为中间层),研究了薄膜的纳米压痕行为、膜基黏附力和膜基系统的摩擦磨损性能.结果表明:DLC薄膜具有低的纳米硬度(3.05 GPa)、低的弹性模量(24.67 GPa)和高的硬弹比(0.122);膜基系统具有高的界面黏附力和好的摩擦磨损性能;在以氮化硅球为对摩件的室温干摩擦条件下其磨损速率在10~(-6)mm~3·m~(-1)·N~(-1)级,摩擦系数约为0.175.分析表明:膜基系统具有的良好抗磨性能与其薄膜具有高的塑性和硬弹比、膜基系统具有好的弹性模量匹配是相一致的;DLC薄膜具有的不寻常力学行为(很低的硬度和弹性模量等)与其基材是镁有关.
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| 关 键 词： | 镁基材 薄膜 纳米压痕 摩擦磨损 磁控溅射 |
Nanoindentation and Friction/Wear Behaviors of Magnetron Sputtered DLC/SiC Bilayer Films on Magnesium Alloy |
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| Xu Xiaojing,Xia Dengfu,Zhuo Liucheng,Hao Xinni,Zong Liang.Nanoindentation and Friction/Wear Behaviors of Magnetron Sputtered DLC/SiC Bilayer Films on Magnesium Alloy[J].Rare Metal Materials and Engineering,2009,38(Z2). |
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| Authors: | Xu Xiaojing Xia Dengfu Zhuo Liucheng Hao Xinni Zong Liang |
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| Affiliation: | Xu Xiaojing,Xia Dengfu,Zhuo Liucheng,Hao Xinni,Zong Liang (Institute of Advanced Forming Technology,Jiangsu University,Zhenjiang 212013,China) |
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| Abstract: | The nano-indentation,film-substrate adhesion and friction/wear properties of DLC/SiC (carbon nitride/silicon carbon) double layer thin film (SiC films as interlayer) deposited on Mg alloy (AZ91D) substrate using magnetron sputtering technique at room temperature were investigated. The results show that the DLC film exhibited a low nano-hardness (3.05 GPa) and Young's modulus (24.67 GPa) but a high ratio of hardness to modulus (0.124). The films-substrate system exhibited a good film-substrate adhesion and g... |
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| Keywords: | Mg substrate thin films nanoindentation friction and wear magnetron sputtering |
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