| PREPARATION OF TiN FILMS BY N_2 ASSISTED Xe~+ ION BEAM ENHANCED DEPOSITION AND THEIR MECHANICAL PROPERTIES |
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| 作者姓名： | WANG Xi YANG Genqing LIU Xianghuai ZHENG Zhihong HUANG Wei ZHOU Zuyao ZOU Shichang Ion Beam Laboratory Shanghai Institute of Metallurgy Academia Sinica shanghai China |
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| 作者单位： | WANG Xi YANG Genqing LIU Xianghuai ZHENG Zhihong HUANG Wei ZHOU Zuyao ZOU Shichang Ion Beam Laboratory，Shanghai Institute of Metallurgy，Academia Sinica，shanghai，China |
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| 摘 要： | A new method for preparation of hard TiN films has been developed by using electronbeam evaporation-deposition of Ti and bombardment with 40 keV Xe~+ ion beam ina N_2 gas environment.The synthesized TiN films were superior to PVD and CVDones in respects of improved adhesion to substrate and low preparing temperature.Theyexhibited good wear resistance and high hardness up to 2200 kg/mm~2.Some industrialapplications have been reported.
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| 收稿时间： | 1992-11-11 |
| 修稿时间： | 1992-11-11 |
PREPARATION OF TiN FILMS BY N_2 ASSISTED Xe~+ ION BEAM ENHANCED DEPOSITION AND THEIR MECHANICAL PROPERTIES |
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| WANG Xi YANG Genqing LIU Xianghuai ZHENG Zhihong HUANG Wei ZHOU Zuyao ZOU Shichang Ion Beam Laboratory,Shanghai Institute of Metallurgy,Academia Sinica,shanghai,China.PREPARATION OF TiN FILMS BY N_2 ASSISTED Xe~+ ION BEAM ENHANCED DEPOSITION AND THEIR MECHANICAL PROPERTIES[J].Acta Metallurgica Sinica(English Letters),1992,5(11):370-374. |
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| Authors: | WANG Xi YANG Genqing LIU Xianghuai ZHENG Zhihong HUANG Wei ZHOU Zuyao ZOU Shichang Ion Beam Laboratory |
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| Affiliation: | WANG Xi YANG Genqing LIU Xianghuai ZHENG Zhihong HUANG Wei ZHOU Zuyao ZOU Shichang Ion Beam Laboratory,Shanghai Institute of Metallurgy,Academia Sinica,shanghai,China |
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| Abstract: | A new method for preparation of hard TiN films has been developed by using electron beam evaporation-deposition of Ti and bombardment with 40 keV Xe~+ ion beam in a N_2 gas environment.The synthesized TiN films were superior to PVD and CVD ones in respects of improved adhesion to substrate and low preparing temperature.They exhibited good wear resistance and high hardness up to 2200 kg/mm~2.Some industrial applications have been reported. |
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| Keywords: | TiN film ion beam enhanced deposition mechanical properties |
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