超声振动复合研磨K9光学玻璃工艺研究

目的探究超声振动复合研磨对光学玻璃研磨可行性,通过响应面法寻求超声振动研磨最优的工艺参数组合。方法在传统研磨装置基础上,添加超声振动装置、蠕动泵、旋转工作台构成超声振动复合研磨装置。添加轴向超声高频振动提高研磨效率,添加旋转工作台提高研磨均匀性,添加蠕动泵便于循环和更新研磨液。利用响应面法优化超声振动复合研磨加工中的主轴转速、振动频率、加工间隙三个变量参数,并进行实验研究,可得出两两变量关联度,从而得出研磨中影响最大的因素。结果通过响应面优化后得到超声振动复合研磨最佳工艺参数为主轴转速1000 r/min、加工间隙0.4 mm、振动频率12 kHz,主轴转速和间隙参数对工件表面研磨加工的影响较大。经25 min研磨,无超声振动的传统研磨方法使表面粗糙度值Ra从0.3μm下降到0.1μm;增加超声振动复合研磨使表面粗糙度值Ra从0.3μm下降到0.04μm。结论经超声振动复合研磨后,光学玻璃表面存在的凹坑、凸起均得到了有效去除,表面粗糙度值下降快,表面形貌均匀、平整。

Study on Hybrid Technology of Ultrasonic Vibration Assisted Abrasive Lapping K9 Optical Glass

The work aims to investigate the feasibility of ultrasonic vibration hybrid lapping for optical glass,and seek the optimal combination of process parameters by ultrasonic vibration lapping through response surface method.Ultrasonic vibration,peristaltic pump and rotating table are added to the traditional lapping device to form an ultrasonic vibration hybrid lapping device.The addition of axial ultrasonic high frequency vibration improves the lapping efficiency;adding a rotating table to improve the lapping uniformity;adding a peristaltic pump facilitates circulation and renewal of the slurry.The response surface method is used to optimize the three variables of spindle speed,vibration frequency and machining gap in the ultrasonic vibration hybrid lapping process, and the experimental research can be carried out to obtain the correlation degree between thetwo variables, and the most influential factors in the lapping are obtained. The optimal process parameters of ultrasonic vibrationhybrid lapping after response surface optimization are: spindle speed 1000 r/min, machining gap 0.4 mm, vibration frequency 12kHz, spindle speed and clearance parameters, which have a great influence on the surface lapping process. After 25 min lapping,the conventional lapping method without ultrasonic vibration is used to grind, and the surface roughness Ra decreases from 0.3μm to 0.1 μm. After the ultrasonic vibration hybrid lapping, the surface roughness Ra decreases from 0.3 μm to 0.04 μm. Afterultrasonic vibration hybrid lapping, the pits and bulges on the surface of the optical glass are effectively removed, the surfaceroughness value decreases rapidly, and the surface morphology is uniform and flat.