离子镀Ti（Al）N涂层的结构与耐蚀性

用空心阴极离子镀制备了Ｔｉ（Ａｌ）Ｎ和ＴｉＮ涂层，０．５ｍｏｌ／Ｌ的Ｈ２ＳＯ４ 溶液中极化曲线结果表明，Ｔｉ（Ａｌ）Ｎ涂层的耐蚀性优于ＴｉＮ涂层。电子探针（ＥＰＭＡ）、Ｘ射 线衍射和扫描电镜等分析了Ｔｉ（Ａｌ）Ｎ涂层的元素分布特征及组织结构。

STRUCTURE AND ANTICORROSION PROPERTY OF Ti (A1)N COATING PREPARED BY ION PLATING

Ti(Al)N coatings were prepared by the Hollow Cathode Discharge(HCD) ion plating technology. The measurement of the corrosion rate of the coating by anode polarization curve in 0.5 mol/L H 2SO 4 solution showed that the better anticorrosion property of Ti(Al)N coating than that of TiN coating. Analysis results of Electronic Probe Mass Analysis (EPMA), Scanning Electronic Microscope (SEM) and X ray diffraction revealed that Al was concentrated uniformly as a band at the interface between the coating and the substrate and compared with TiN coating, Ti(Al)N coating consisted of finer fibrous grains and distinct denser columnar grains. Meanwhile the effect of the structure on the anticorrosion property is discussed.