248 nm准分子激光旋转加工锥形孔试验

采用准分子激光对PMMA板进行加工,通过旋转台完成打孔,并探究多项参数对于微孔深度与锥度的影响。研究发现:在一定范围内,当脉动频率和单脉冲能量增加时,微孔的深度线性增加、锥度线性减小;旋转速度对于微孔的深度和锥度无太大影响;采用较大的三角形掩模加工微孔的锥度最佳。通过选择合适的掩模与参数,加工出的微孔比冲孔法效果更佳。

Experimental on Rotating Drilling of 248 nm Excimer Laser Processing Conical Micro-holes

The excimer laser is used to process PMMA plate,and the conical micro-holes morphology is prepared by rotating table.The effects of various influencing factors on the conical micro-holes depth and taper were explored through experiments.By summarizing,it is concluded that within a certain range,when the number of laser pulses and the energy of single pulse increase,the depth of the conical micro-holes increases linearly but the taper decrease.Thus,the rotational speed and laser pulse frequency have no effect on the depth and taper of the conical micro-holes.For larger triangular masks,the micro-holes get a better taper.By selecting the appropriate mask and parameters,a better result than the direct writing method for the conical micro-holes is obtained.