金刚石线锯切割碳化硅陶瓷的机理与工艺研究

通过金刚石线锯切割碳化硅陶瓷的单因素试验设计，研究线速度、进给速度、进给速度与线速度比值R等工艺参数对其表面质量的影响规律，并通过超景深三维显微镜、精密粗糙度轮廓仪对其表面形貌、表面粗糙度进行观察和测量。结果表明:当线速度从0.4 m/s增加到1.3 m/s时，碳化硅陶瓷的表面形貌明显改善，进给方向和线锯方向的表面粗糙度分别下降了20.35%和10.45%；当进给速度从6 μm/s增加到24 μm/s时，其表面形貌由好转差，进给方向与线锯方向的表面粗糙度分别上升了12.07%和3.91%；当进给速度与线速度增加但两者比值R固定为2×10-5时，碳化硅陶瓷的表面质量基本维持在同一水平。 

Study on mechanism and process of cutting silicon carbide ceramics with diamond wire saw

Through the single factor experiment design of cutting SiC ceramics with diamond wire saw, the influences of technological parameters such as the linear speed, the feed speed and the ratio R of feed speed to linear speed on the surface quality of SiC ceramics were studied. The surface morphology and surface roughness were observed and measured by ultra depth of field three-dimensional microscope and precision roughness profiler. The results show that when the linear speed is increased from 0.4 m/s to 1.3 m/s, the surface morphology of SiC ceramics is obviously improved, and the surface roughness in the feed direction and in the wire saw direction is reduced by 20.35% and 10.45%, respectively. When the feed speed is increased from 6 μm/s to 24 μm/s, the surface morphology has changed from better to worse, and the surface roughness in the feed direction and in the wire saw direction is increased by 12.07% and 3.91%, respectively. When the feed speed and the linear speed are increased, while the ratio R of the two is fixed at 2×10-5, the surface quality of SiC ceramics is basically maintained at the same level.