直流电弧等离子体喷射法制备金刚石自支撑膜研究新进展

文章综述了以直流电弧等离子体喷射法制备自支撑金刚石膜的研究新进展，对电弧特性、金刚石晶体质量、力学性能、光学性能及热学性能进行了介绍。研究表明:不同电弧区域的金刚石膜结晶质量及应力状态有所差异，钛过渡层可以降低金刚石的残余应力；采用四点弯曲测得金刚石的断裂韧性为10.99 MPa·m1/2；一定温度范围内，金刚石吸收系数与温度的关系基本不受金刚石质量和厚度的影响；金刚石的光学性能越好，其热导率越高，且金刚石形核面热导率略高于生长面，500 K以上时多晶金刚石膜的热导率近似于单晶水平。 

Recent progress of free-standing diamond films prepared by DC arc plasma jet method

In this paper, the recent progress of free-standing diamond films prepared by DC (direct current) arc plasma jet is reviewed from arc characteristics, diamond crystal quality, mechanical properties, optical properties and thermal properties. The results shows that the crystalline quality and stress state of diamond films are different in various regions of arc, and that Ti transition layer can reduce the residual stress of diamond. The fracture toughness of diamond is up to 10.99 MPa·m1/2 by four-point bending method. In a certain temperature range, the change tendency of the absorption coefficient and temperature is independent of the crystalline quality and thickness of diamond films. The better optical properties of diamond films are, the higher thermal conductivity is. The thermal conductivity of nucleation surface is slightly higher than that of growth surface. When temperature is more than 500 K, the thermal conductivity of polycrystalline diamond films could approach that of single crystal.