激光结构磨削在氮化硅陶瓷中的磨削行为

为提高氮化硅陶瓷的加工精度，用激光辅助复合加工技术在氮化硅表面烧蚀出4种具有相同表面积的结构化图案，然后用金刚石砂轮对氮化硅表面进行磨削，研究图案结构对磨削效果的影响，并分析砂轮转速、进给速率等参数对磨削力的影响。结果表明:激光烧蚀能够在氮化硅表面产生凹槽并降低表面氮化硅的强度，从而有利于磨削液进入并降低磨削力，最高降幅达63%。同时，金刚石砂轮磨损也有效降低。磨削结构化的氮化硅表面时，砂轮转速和进给速率对磨削力的影响规律同磨削普通氮化硅时的规律一致。 

Study on grinding behavior of laser-structured grinding in silicon nitride ceramic

Four patterns with the same surface area were etched by laser irradiation on the surface of Si₃N₄ ceramics to improve the machining precision. The surfaces with etched patterns were then ground by using diamond grinding wheels, and the effect of pattern form on grinding effect was studied, as well as the effects of wheel speed and infeed speed on grinding force. The results indicate that laser irradiation could produce grooves on Si₃N₄ surface, where the grinding fluid are easy to enter, and that it also reduces the strength of surface Si₃N₄ and then the grinding force decreases up to 63%. Meanwhile, the wheel wear is alleviated. The influence laws of wheel speed and infeed speed on grinding force are the same with those when grinding normal Si₃N₄.