Fabrication of curved micro structures on photoresist layer |
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Authors: | Jae Sung YOON Tae-Jin JE Doo-Sun CHOI Sung Hwan CHANG Kyung-Hyun WHANG Nano Mechanical Systems Research Division Korea Institute of Machinery Materials Daejeon - Korea |
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Affiliation: | Jae Sung YOON,Tae-Jin JE,Doo-Sun CHOI,Sung Hwan CHANG,Kyung-Hyun WHANG Nano Mechanical Systems Research Division,Korea Institute of Machinery and Materials (KIMM),Daejeon 305-343,Korea |
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Abstract: | A novel fabrication process for micro patterns with curvature was introduced. The curved structures were made by compensating rectangular micro structures with liquid photoresist layer. Because of the surface tension of the liquid in micro scale, various shapes of meniscus can be made on the micro channels. The micro channels were made on the silicon substrate in advance, and then the liquid layer was coated on the micro channels. From the nature of liquid behavior, the curved patterns with smooth surface a... |
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Keywords: | micro pattern liquid layer MEMS micro channel silicon substrate |
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