| 基于XRD的薄膜界面结合强度试验研究 |
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| 引用本文： | 孔德军,张永康,鲁金忠,冯爱新,任旭东,葛涛.基于XRD的薄膜界面结合强度试验研究[J].中国表面工程,2007,20(1):38-41. |
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| 作者姓名： | 孔德军 张永康 鲁金忠 冯爱新 任旭东 葛涛 |
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| 作者单位： | 江苏大学,机械工程学院,江苏,镇江,212013 |
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| 基金项目： | 国家自然科学基金;江苏省研究生培养创新工程项目 |
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| 摘 要： | 利用X射线衍射技术（XRD）分析了薄膜结合界面应力及其变化规律，通过对薄膜界面结合状态的检测，建立了X衍射法测量薄膜界面结合强度的原理、方法与过程。其检测界面结合强度方法可对薄膜试样进行非接触检测，适用于晶体或多晶体薄膜的界面结合强度测量，是一种研究无损检测薄膜结合强度的试验新方法。
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| 关 键 词： | 结合强度 X衍射法(XRD) 薄膜 残余应力 |
| 文章编号： | 1007-9289(2007)01-0038-04 |
| 修稿时间： | 2006-09-07 |
Experimental Study on Interracial Bonding Strength of the Film by XRD |
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| KONG De-jun,ZHANG Yong-kang,LU Jin-zhong,FENG Ai-xin,Ren Xu-dong,GE Tao.Experimental Study on Interracial Bonding Strength of the Film by XRD[J].China Surface Engineering,2007,20(1):38-41. |
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| Authors: | KONG De-jun ZHANG Yong-kang LU Jin-zhong FENG Ai-xin Ren Xu-dong GE Tao |
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| Affiliation: | School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013 China |
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| Abstract: | The stresses and variational laws of the film interface were measured by X-ray diffraction (XRD),and the principle,method and process of measuring interfacial bonding strength of the film were established by measuring of interfacial bonding state.The method of measuring interfacial bonding strength of the film is a non-contact measurement,which is applied to measure interfacial bonding strength of multi-crystal and crystal film,it is a new kind of experimental method to research and measure bonding strength of the film. |
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| Keywords: | bonding strength X-ray diffraction (XRD) film residual stress |
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