| 钛膜表面氧气氧化层研究 |
| |
| 引用本文： | 刘文科,曹小华,彭述明,龙兴贵,李宏发,杨茂年,张晓红,颜登云,王维笃,杨本福.钛膜表面氧气氧化层研究[J].材料导报,2004,18(5):92-94. |
| |
| 作者姓名： | 刘文科 曹小华 彭述明 龙兴贵 李宏发 杨茂年 张晓红 颜登云 王维笃 杨本福 |
| |
| 作者单位： | 中国工程物理研究院核物理与化学研究所,绵阳,621900 |
| |
| 基金项目： | 中国工程物理研究院预研项目，中国工程物理研究院核物理与化学研究所科技创新项目 |
| |
| 摘 要： | 研究了钼基钛膜表面氧气氧化工艺;用XRD分析了氧气氢化层的物相,其物相随氧化条件而异,含有Ti、TiO2、TiO、Ti2O、Ti3O和Ti6O等多种物相;用XPS研究了氧气氧化层钛的主要价态,其主要价态为 4、 3和 2价;用AES深度剖析研究了氧气氧化层的厚度,并研究了温度、氧气压力和时间对氧气氧化层厚度影响的规律;所有氧气氧化层均不与腐蚀介质发生作用,证明了该氧化层致密连续.
|
| 关 键 词： | 钛膜 表面 氧化层 连续 |
The Study on Oxide Layer on the Surface of Titanium Film in the Oxygen |
| |
| LIU Wenke CAO Xiaohua PENG Shumin LONG Xingui LI Hongfa YANG Maonian ZHANG Xiaohong YAN Dengyun WANG Weidu YANG Benfu.The Study on Oxide Layer on the Surface of Titanium Film in the Oxygen[J].Materials Review,2004,18(5):92-94. |
| |
| Authors: | LIU Wenke CAO Xiaohua PENG Shumin LONG Xingui LI Hongfa YANG Maonian ZHANG Xiaohong YAN Dengyun WANG Weidu YANG Benfu |
| |
| Abstract: | Researching process of oxidation in the oxygen is conducted on the surface of titanium film of molybdenum substrate. The phase of oxide layers changes with the condition of oxidation by XRD analysis, including such phases as Ti, TiO_2, TiO, Ti_2O, Ti_3O and Ti_6O. Titanium valence mainly comprises +4, +3 and +2 on the surface of oxide layer by XPS analysis. The thickness of the oxide layer is analyzed by AES depth profile, and the law of influence of temperature, oxygen pressure and time on the thickness of the oxide layer is studied respectively. All oxide layers do not react with corrosion medium, proven that the oxide layers are compact and continuous. |
| |
| Keywords: | titanium film surface oxide layer continuity |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
