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| 熔石英亚表面缺陷的研究进展 | |
| 引用本文： | 蒋勇,袁晓东,祖小涛,向霞,徐世珍,吕海兵,章春来,尹伟,陈猛,王成程.熔石英亚表面缺陷的研究进展[J].材料导报,2009,23(13). |
| 作者姓名： | 蒋勇 袁晓东 祖小涛 向霞 徐世珍 吕海兵 章春来 尹伟 陈猛 王成程 |
| 作者单位： | 1. 中国工程物理研究院激光聚变研究中心,绵阳,621900;电子科技大学物理电子学院,成都,610054 2. 中国工程物理研究院激光聚变研究中心,绵阳,621900 3. 电子科技大学物理电子学院,成都,610054 |
| 基金项目： | 国家高技术研究发展计划(863计划)，电子科技大学青年基金重点项目 |
| 摘 要： | 介绍了熔石英亚表面缺陷(SSD)的深度分布与粒径的量化关系及表面粗糙度的量化,以及杂质引起热破坏、裂纹导致电场增强、缺陷导致机械性能弱化3种诱导熔石英损伤的机理.还介绍了氢氟酸(HF)刻蚀和激光预处理2种非常有效的控制熔石英亚表面缺陷的技术,并对熔石英亚表面缺陷研究现状、存在问题和发展趋势进行了简要的总结和展望. |
| 关 键 词： | 亚表面缺陷 缺陷量化 损伤机理 HF酸刻蚀 激光预处理 |
Research Progress on Subsurface Defects in Fused Silica |
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| JIANG Yong,YUAN Xiaodong,ZU Xiaotao,XIANG Xia,XU Shizhen,LU Haibing,ZHANG Chunlai,YIN Wei,CHEN Meng,WANG Chengcheng.Research Progress on Subsurface Defects in Fused Silica[J].Materials Review,2009,23(13). | |
| Authors: | JIANG Yong YUAN Xiaodong ZU Xiaotao XIANG Xia XU Shizhen LU Haibing ZHANG Chunlai YIN Wei CHEN Meng WANG Chengcheng |
| Affiliation: | JIANG Yong1,2,YUAN Xiaodong1,ZU Xiaotao2,XIANG Xia1,XU Shizhen2,LU Haibing1,ZHANG Chunlai1,YIN Wei1,CHEN Meng1,WANG Chengcheng1(1 Laser Fusion Research Center,China Academy of Engineering Physics,Mianyang 621900,2 School of Physical Electronics,University of Electronic Science , Technology of China,Chengdu 610054) |
| Abstract: | In this paper the quantitative analysis of the relationship between depth distribution and particle size,and surface roughness of subsurface defects(SSD) in fused silica are reviewed.Three kinds of defect-induced damage mechanisms are summarized: Impurity-induced thermal damage,crack-induced electric field enhancement and defect-induced mechanical strength weakening.As two kinds of efficient techniques to control SSD in fused silica,HF et-ching and laser conditioning are also introduced.In addition,the rese... |
| Keywords: | subsurface defects defect quantifying damage mechanism HF etching laser conditioning |
| 本文献已被 CNKI 万方数据 等数据库收录！ | |
