| 氮化钛硬质薄膜的制备方法 |
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| 引用本文： | 晏鲜梅,熊惟皓.氮化钛硬质薄膜的制备方法[J].材料导报,2006,20(Z1):236-238. |
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| 作者姓名： | 晏鲜梅 熊惟皓 |
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| 作者单位： | 华中科技大学模具技术国家重点实验室,武汉,430074 |
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| 基金项目： | 国家自然科学基金，湖北省自然科学基金 |
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| 摘 要： | 随着新工艺和新技术的不断出现,涂层方法越来越多,膜的种类也层出不穷.氮化钛薄膜因具有许多优良的性能而得到了广泛的应用.介绍了几种制备氮化钛硬质薄膜的新方法、形成机理以及其优缺点,并展望了今后的涂层方法的发展.
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| 关 键 词： | 氮化钛 硬质薄膜 制备 |
Preparation Methods of TiN Hard Films |
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| YAN Xianmei,XIONG Weihao.Preparation Methods of TiN Hard Films[J].Materials Review,2006,20(Z1):236-238. |
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| Authors: | YAN Xianmei XIONG Weihao |
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| Abstract: | TiN hard film has been widely used in recent years for many of its good properties. Several preparation methods of TiN have been introduced and formation mechanics as well as their merits also be described. In the end of the paper the developmental trend has been pointed out. |
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| Keywords: | TiN hard films preparation |
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