H-结构薄板纵弯复合模态驱动的压电直线电机

为高性能压电直线电机设计奠定基础，推出基于H型振子的直线电机并利用该振子两纵向杆面内一阶纵振与二阶弯振驱动电机。研究电机的驱动机理并从理论上阐释振子纵杆驱动端质点的椭圆运动形成过程；建立振子有限元模型并对其工作模态、灵敏度、谐响应进行分析；优化振子结构尺寸，完成电机装配结构设计并制作出振子、电机实物；对振子进行模态试验，结果显示该振子不仅具有预设的工作模态，且在正常激励条件下，驱动端纵、弯振幅值分别可达1.2 μm，1.4 μm。研究表明，该电机有望产生较大速度与动力。

An Ultrasonic Linear Motor Based on both the H-shaped Vibrator’s Longitudinal mode and Bending mode

To develop theoretical instructions for design of high performance linear motor, a piezoelectric linear motor based on an H-shaped vibrator is presented, which employed the vibrator’s 2nd bending vibration mode and 1st longitudinal to drive the motor. Firstly, the motor’s working principle is proposed, and the generating of elliptical motions generated on the driving ends of the vibrator’s two longitudinal bars is described. Then, a FEM model is built for the vibrator so as to calculate the working modes and execute harmonic the response analysis and sensitivity analysis for the vibrator. Furthermore, the optimal size of the vibrator is given and the motor assembly structure is designed. Finally, modal test is done for the vibrator which validates that the vibrator is of the assumed work modes and shows that longitudinal vibration amplitude and the bending vibration amplitude of the vibrator’s driving end could reach 1.4μm and 1.2μm respectively. It is concluded that the vibrator could generate larger thrust and speed.