| 基于模糊图像合成技术的MEMS平面微运动测试技术 |
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| 引用本文： | 金翠云,靳世久,栗大超,冯亚林,李一博,郝一龙.基于模糊图像合成技术的MEMS平面微运动测试技术[J].纳米技术与精密工程,2004,2(2):112-116. |
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| 作者姓名： | 金翠云 靳世久 栗大超 冯亚林 李一博 郝一龙 |
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| 作者单位： | 1. 天津大学精密测试技术及仪器国家重点实验室,天津,300072
2. 北京大学微电子学研究院,北京,100871 |
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| 基金项目： | “8 63”高技术研究发展计划资助 (2 0 0 2AA40 4 0 90 ) |
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| 摘 要： | 随着微电子机械系统(MEMS)研究的深入和产业化的需求，捡测技术在其中的重要性越来越大．基于机器微视觉的MEMS动态测试系统．利用模糊图像合成技术对MEMS的平面微运动特性参数进行提取和分析．利用图像处理方法对MEMS谐振器做扫频和扫压测量，获得了MEMS器件的平面微运动特性，并对测量结果进行了分析和讨论．由实验结果可以看出，这种方法有较高的测量精度，测量重复性误差为100nm．
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| 关 键 词： | 模糊图像合成技术 微电子机械系统 谐振器 动态测试 |
| 文章编号： | 1672-6030(2004)02-0112-05 |
| 修稿时间： | 2004年4月10日 |
Measurement Technique of In-Plane Motion for MEMS Based on Blur Image Synthesis |
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| JIN Cui-yun ,JIN Shi-jiu ,LI Da-chao ,FENG Ya-lin ,LI Yi-bo ,HAO Yi-long.Measurement Technique of In-Plane Motion for MEMS Based on Blur Image Synthesis[J].Nanotechnology and Precision Engineering,2004,2(2):112-116. |
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| Authors: | JIN Cui-yun JIN Shi-jiu LI Da-chao FENG Ya-lin LI Yi-bo HAO Yi-long |
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| Affiliation: | JIN Cui-yun 1,JIN Shi-jiu 1,LI Da-chao 1,FENG Ya-lin 2,LI Yi-bo 1,HAO Yi-long 2 |
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| Abstract: | Testing technique is more and more important because of research and development of MEMS. Based on machine micro-vision dynamic testing system for MEMS, the technique of blur image synthesis is presented to exact and analyze in-plane motion characteristic of MEMS devices. Image processing method is used to carry out frequency sweep and voltage sweep measurement. The in-plane motion characteristic of MEMS is obtained and the testing results are analyzed and discussed. From experiment results it can be seen that the resolution and repeatability of the method is obtain to 100nm. |
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| Keywords: | MEMS dynamic test blur image resonator frequency sweep voltage sweep |
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