MEMS陀螺六阶连续带通多反馈∑△M闭环控制系统

设计了一种用于MEMS陀螺敏感模态的六阶连续带通多反馈∑△M闭环控制系统，以及相应的系统参数多目标优化方法．与以往的低通∑△M闭环控制系统相比，该系统不仅具有更好的噪声整形特征，能较大程度抑制陀螺噪声，而且易于在PCB电路上实现．由于整个闭环系统非常复杂且非线度较高，采用遗传算法对系统参数进行了多目标优化．系统优化之后的仿真结果显示，当输入角速度为200°／8时，在64Hz带宽范围内陀螺信号的信噪比可大于90dB，底噪为-120dBV／／Hz．最后采用常压封装的z轴全对称解耦结构的绝缘体上硅陀螺在PCB电路上进行了系统功能验证，测试结果显示系统具有明显的带通噪声整形特征，陀螺底噪为-100dBV／Hm．

MEMS Gyroscope Control by Sixth-Order Continuous-Time Band-Pass Sigma-Delta Modulator （∑AM） with Multi-Feedback Loops

This paper presents a sixthorder continuoustime force feedback bandpass sigmadelta modu lator （BPEAM） with multifeedback loops for the sense mode of MEMS gyroscope and a corresponding multiobjective parameter optimization method based on genetic algorithm（GA）. Compared with previous lowpass EAM control system, it has better noise shaping ability and can be easily implemented in print circuit board （PCB） using standard offtheshelf electronic components. As the system is extremely com plex and highly nonlinear, the genetic algorithm is used to perform multiobjective parameter optimiza tion. The simulated power spectrum density （PSD） of the optimized design for the BPEAM shows that the signaltonoise ratio （SNR） is larger than 90 dB within a bandwidth of 64 Hz, 200°/s angular input; the noise floor can achieve 120 dB. A zaxis fully decoupled sihcononinsulator （SOI） atmos pheric MEMS gyroscope and all the other standard offtheshelf electronic components are mounted on a fourlayer PCB to verify the functionality of the optimized EAM closedloop system. Measurement of the PSD of the output bitstream shows an obvious bandpass noise shaping and a deep notch at the gyroscope drive mode resonant frequency and reveals a noise floor of 100 dBV/Hz.