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氦质谱非真空积累检漏法中几个问题的研究
引用本文:王勇,邵容华,闫荣鑫,孙立臣,李征,孙伟.氦质谱非真空积累检漏法中几个问题的研究[J].真空科学与技术学报,2012,32(2):118-122.
作者姓名:王勇  邵容华  闫荣鑫  孙立臣  李征  孙伟
作者单位:北京卫星环境工程研究所 北京100094
摘    要:氦质谱非真空积累检漏法被广泛应用于航天器的总漏率测试中,因此研究氦质谱非真空检漏法具有重要的工程实际意义。本文首次详细给出了氦质谱非真空积累检漏法计算公式的详细推导过程,同时讨论了采用柔性收集室技术可能产生的一些问题。研究结果表明:氦质谱非真空积累检漏法有着严格的理论依据;柔性收集室的技术在理论上是可行的。本文的研究结论可以为氦质谱非真空积累检漏法的工程应用提供理论依据。

关 键 词:检漏  氦质谱非真空积累检漏法  刚性收集室  柔性收集室

Improvements of Non-Vacuum Accumulation Leak Detection by Helium Mass Spectroscopy
Wang Yong , Shao Ronghua , Yah Rongxin , Sun Lichen , Li Zheng , Sun Wei.Improvements of Non-Vacuum Accumulation Leak Detection by Helium Mass Spectroscopy[J].JOurnal of Vacuum Science and Technology,2012,32(2):118-122.
Authors:Wang Yong  Shao Ronghua  Yah Rongxin  Sun Lichen  Li Zheng  Sun Wei
Affiliation:(Beijing Institute of Spacecraft Environment Engineering,Beijing 100094,China)
Abstract:The fairly precise calculation formula was for the first time derived to analytically evaluate the non-vacuum accumulation leak detection by helium mass spectroscopy,widely used in the total leak detection of the space-craft.The discussions centered on some technical problems caused by the flexible accumulation chamber,including the impacts of the variations in the volume of the flexible accumulation chamber on the helium concentration,the total gas amount,and the pressure at the inlet of the leak detector;and the diffusion,adsorption/desorption of gases.The results show that the non-vacuum accumulation leak detection by helium mass spectroscopy has a rigorously theoretical base,and it is feasible for leak detection of the flexible accumulation chamber.
Keywords:Leak testing  Method for non-vacuum accumulation leak detection of helium mass spectrometer  Rigid accumulation chamber  Flexible accumulation chamber
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