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电子束焊接束流诊断用法拉第筒传感器研制
引用本文:彭勇,王克鸿,周琦,沈春龙.电子束焊接束流诊断用法拉第筒传感器研制[J].真空科学与技术学报,2012,32(7):649-652.
作者姓名:彭勇  王克鸿  周琦  沈春龙
作者单位:1. 南京理工大学材料科学与工程学院 南京 210094
2. 南京师范大学计算机科学与技术学院 南京 210097
基金项目:南京理工大学自主科研专项计划资助项目(2010XQTR01);国家科技重大专项-高档数控机床与基础制造装备项目(2010ZX04007-041)
摘    要:针对中高压电子束焊机5~100mA的电子束流诊断,完成了法拉第筒传感器的研制。该传感器由法拉第筒、微弱信号放大电路、增益控制电路构成。法拉第筒电极入射孔采用双孔结构,有效的阻止了二次电子和背散射电子的逸出,提高了电子束流的收集效率。通过控制微弱信号放大电路的增益将整个束流强度范围内的信号放大到伏级。在Ua=150 kV,Ib=10mA,If=360mA,H=315 mm条件下采集功率密度分布数据,得到束流密度的二维分布图形。由于受电子束焊机特性的影响,束流功率密度分布呈非对称性的近高斯分布。

关 键 词:电子束焊接  法拉第筒  束流诊断  功率密度分布

Faraday Cup Sensor for Diagnostics of Electron Beam Welding
Peng Yong , Wang Kehong , Zhou Qi , Shen Chunlong.Faraday Cup Sensor for Diagnostics of Electron Beam Welding[J].JOurnal of Vacuum Science and Technology,2012,32(7):649-652.
Authors:Peng Yong  Wang Kehong  Zhou Qi  Shen Chunlong
Affiliation:1.School of Materials Science and Engineering,Nanjing University of Science and Technology,Nanjing 210094,China;2.College of Computer Science & Technology,Nanjing Normal University,Nanjing 210097,China)
Abstract:A novel type of Faraday cup sensor was developed to diagnose the electron beam,5~100 mA,in the high voltage electron beam welder.The newly-developed sensor consists of a Faraday cup,a weak signal amplification circuit,and a gain control circuit.The two trapping holes in the Faraday cup significantly improve the efficiency of electron beam collection because few secondary and back-scattered electrons could possibly escape.The signal of any electron beam intensity in the full range can be easily amplified to voltage scale.The 2-diensional power density distributions were acquired under the conditions:Ua=150 kV,Ib=10 mA,If=360 mA,and H=315 mm.The possible mechanisms responsible for the asymmetrical Gaussian distribution of the power density were also tentatively discussed.
Keywords:Electron beam welding  Faraday cup  Beam diagnostics  Power density distribution
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