| CVD金刚石形核的研究 |
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| 引用本文： | 黄元盛,邱万奇,刘正义.CVD金刚石形核的研究[J].真空科学与技术学报,2001,21(6):492-494. |
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| 作者姓名： | 黄元盛 邱万奇 刘正义 |
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| 作者单位： | 华南理工大学机电系,广州,510640 |
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| 基金项目： | 国家教委博士点基金资助项目(批准号:1999056121);广东省自然科学基金资助项目(No.990548) |
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| 摘 要： | 在钢渗铬层和硅片上进行了化学气相沉积金刚石膜,发现在渗铬层上形成的金刚石膜以球形金刚石为主;用高倍扫描电子显微镜分析显示,渗铬层上的球形金刚石是由大量二次晶核长大的微晶金刚石和非晶碳组成.
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| 关 键 词： | 化学气相沉积 金刚石 二次形核 |
| 文章编号： | 0253-9748(2001)01-0492-03 |
| 修稿时间： | 2001年5月30日 |
Studies of Nucleation of Diamond Films Grown by Chemical Vapor Deposition |
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| Huang Yuansheng,Qiu Wanqi,Liu Zhengyi.Studies of Nucleation of Diamond Films Grown by Chemical Vapor Deposition[J].JOurnal of Vacuum Science and Technology,2001,21(6):492-494. |
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| Authors: | Huang Yuansheng Qiu Wanqi Liu Zhengyi |
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| Abstract: | Diamond films were grown on substrates of surface chromized steel and silicon wafers by chemical vapor deposition.The microstructures of diamond films were studied with high resolution scanning electron microscopy(SEM)and Raman spectroscopy.SEM micrographs show that spherical diamond grains,grown on surface chromized steel,consist of a large number of smaller microcrystallites separated by amorphous carbon and other impurities. |
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| Keywords: | CVD Diamond Second nucleus |
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